PVD
(equipment & process)
- General maintenance
- Cyro regens
- Kit changes
- Target changes
- MFC cal
- Robot maintenance
- Power supply cal
- Vacuum Pump Maintenance
- Leak Checking
- System down situations
- Equipment
- Perk and Elmer
- AMAT
- MRC
- Novellus
- Process quals
- Process development
Diffusion Furnaces
(equipment & process)
- General maintenance
- Wipe cleans
- Loader maintenance
- MFC cal
- Load checking
- System down situations
- element replacement
- Loader trouble shooting
- General troubleshooting
- Equipment
- Thermco
- MRL
- Protemp
- Centrotherm
- Despatch
- Sierra Therm
- Process development
Plasma Ashers
(equipment & process)
- General maintenance
- Chamber cleans
- MFC cal
- Robot maintenance
- Power supply cal
- Vacuum Pump Maintenance
- Leak Checking
- System down situations
- Equipment
- Gasonics
- Mattson
- Branson
- Process quals
- Process development
DRIE
(equipment)
- General maintenance
- Chamber cleans
- MFC cal
- Robot maintenance
- Power supply cal
- Vacuum Pump Maintenance
- Leak Checking
- System down situations
- Equipment
- AMAT
- SST
- Alcatel
- Process quals
PECVD
(equipment)
- General maintenance
- Chamber cleans
- MFC cal
- Robot maintenance
- Power supply cal
- Vacuum Pump Maintence
- Leak Checking
- System down situations
- Equipment
- AMAT
- Novellus
- Roth and Rau
- Process quals
Wet Station
(equipment)
- General maintenance
- Bath changes
- Pump Maintenance
- Robot maintenance
- Filter Changes
- System down situations
- Equipment
- Akrion
- ChemSafe
- Wafab
- Vertech
- Semitool
- Process quals
Plating Station
(equipment)
- General maintenance
- Bath changes
- Pump Maintenance
- Robot maintenance
- Filter Changes
- Anode Changes
- System down situations
- Equipment
- Semitool
- EEJA
- Novellus
- Process quals
APCVD
(equipment)
- General maintenance
- Injector Changes
- Muffle Etches
- Robot maintenance
- Exhaust Cleaning and Maintenance
- System down situations
- Equipment
- WJ 1000/999
- Process quals
EPI
(equipment)
- General maintenance
- Chamber cleans
- MFC cal
- Robot maintenance
- Power supply cal
- Vacuum Pump Maintenance
- Leak Checking
- System down situations
- Equipment
- LPE
- ASM
- Process quals
Leak Detection
Gas Purification
Toxic Gas Systems
(delivery & cabinets)
- Equipment selection
- Set-up
- Generating Procedure for operation
Fab layout/design/workflow
- Pilot line to Production line